Metrology

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  • Ellipsometry for film thickness and refractive index measurement
  • CD SEM
  • Profileometry
  • Film stress measurement
  • Surfscan Particle/Defect Monitoring on blanket or Patterned wafers
  • Sheet Resistance Measurement
  • Metal Thickness/Resistivity measurement
  • C-V and lifetime measurement
  • Ellipsometry for film thickness and refractive index
  • Critical dimension measurement
  • White light interferometry
  • Thin film stress
  • Particle count
  • Four point probe (silicon resistivity)
  • Mgauge (metal thickness/resistivity)
  • SEM with EDAX Capability for elemental analysis

News

SEMEFAB ARE NOW RECRUITING

30 Apr 2013

Semefab will be exhibiting at the MEMS UK exhibiton at

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Semicon China

06 Mar 2013

Semefab will be exhibiting at the MEMS UK exhibiton at

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Allan James

22 Oct 2012

Semefab will be exhibiting at the MEMS UK exhibiton at

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