Semefab MEMS

MEMS 2 Foundry

Semefab’s MEMS2 Fab is a 600 square metre class 100 operation (class 10 Photo) supporting 6” & 4” volume foundry of MEMS Technology down to 0.8µm.

The MEMS2 Fab is completely autonomous from the CMOS1 & CMOS3 Fabs with independent air handling and waste streams. This ensures there is no cross contamination from MEMS to the CMOS fabs.

Semefab presently supports several volume foundry agreements...

Pressure sensors
Temperature sensors
Gas sensors
Bolometers
Medical MEMS devices.

Semefab has specific interests in a further 4 MEMS market segments...

MEMS Energy Harvesting
Medical MEMS
MEMS for Defence Applications
MEMS Sensor Portfolio

Where synergies exist, Semefab partners with its customers to exploit the commercial opportunity.

Refer to the Products page for more detail or contact
Ian McNaught to discuss your requirements.

In conjunction with the commercialisation model, the Semefab volume value proposition allows cost-effective development coupled to seamless transition from development to volume. This volume value proposition ensures optimal internal knowledge transfer between Semefab’s process development team and its process engineering team.

MEMS2 Fab is an ISO9001 & ISO14001 accredited environment

PVD Sputter

Spin on coatings

3 Axis Accelerometer - Triple Bonded Stack