Plasma Etch

• Silicon, Nitride, Polysilicon, SiCr and TiW plasma etch (SF6, SF6/O2)
• Oxide and Oxynitride plasma etch (C2F6, CHF3)
• Aluminium plasma etch (BCl3, Cl2, CH4, N2, CF4, O2)
• Resist and Polyimide etch (O2, CF4)