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Wafer Bonding

Advanced EVG520IS Wafer Bonder

  • Silicon to glass (Pyrex, Borofloat) Anodic Bonding
  • Eutectic thermo-compression bond

Plasma_Etch Diffusion thin Films Deep Reactive Ion Etching Spin on Coatings Wet Chemical Etch Metrology Physical Vapour Disposition (PVD) Dry Isotropic EtchWafer BondingPhoto Lithography
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