Wet Chemical Processing

• HydroFluoric (oxide)
• Orthophosphoric (nitride)
• Sulphuric Peroxide Mix (resist removal and wafer clean)
• Aluminium and Silicon etch chemical mixes
• Gold, NiCr and TiW chemical wet etches
• Potassium Hydroxide for deep silicon wet etch for MEMS membrane release
• Solvent Resist stripping
• Resist Lift Off processing