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AML Aligner Wafer Bonder
 Wafer Bonding
 
  • Silicon to glass (Pyrex, Borofloat)
  • Anodic bond
  • Silicon to Silicon activated bond
  • Pyrex cap glass frit bond
  • Eutectic thermocompression bond

 
Computer Aided Alignment Wafer Chamber AML Aligner Wafer Bonder
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