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Wet Etch
 Wet Chemical Etch
 
  • HydroFlouric (oxide)
  • Orthophosphoric (nitride)
  • Sulphuric Peroxide Mix (resist removal and wafer clean)
  • Aluminium and Silicon etch chemical mixes
  • Gold, NiCr and TiW chemical wet etches
  • Potassium Hydroxide for deep silicon wet etch for MEMS membranes
  • XeFe2 etch for MEMS sacrificial layers

 

 

 
Wet Etch Wet Etch
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