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WYKO Optical Profiling System
 Metrology
 
  • Ellipsometry for film thickness and refractive index
  • Critical dimension measurement
  • Profilometry
  • White light interferometry
  • Thin film stress
  • Particle count
  • Four point probe (silicon resistivity)
  • Mgauge (metal thickness/resistivity)
  • SEM

 
WYKO Optical Profiling System
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