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Semefab Plasma Etch
  Plasma etching
 
  • Silicon, Nitride and TiW plasma etch (SF6, SF6/O2)
  • Oxide and Oxynitride plasma etch (C2F6, CHF3)
  • Aluminium plasma etch (BCl3, Cl2, CH4, N2, CF4, O2)
  • Resist and Polyimide etch (O2, CF4)

 

 
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